Preparation and characterization of Nb2O5-Al 2O3 composite oxide formed by cathodic electroplating and anodizing

Joo Hee Jang; Tae Yoo Kim; Nam Jeong Kim; Chang Hyoung Lee; Eun Mi Park; Chan Park; Su Jeong Suh

doi:10.1016/j.mseb.2011.07.021

Preparation and characterization of Nb₂O₅-Al ₂O₃ composite oxide formed by cathodic electroplating and anodizing

Joo Hee Jang
, Tae Yoo Kim
, Nam Jeong Kim
, Chang Hyoung Lee
, Eun Mi Park
, Chan Park
, Su Jeong Suh

Department of Advanced Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

Al foil was coated with niobium oxide by cathodic electroplating and anodized in a neutral boric acid solution to achieve high capacitance in a thin film capacitor. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) revealed the niobium oxide layer on Al to be a hydroxide-rich amorphous phase. The film was crystalline and had stoichiometric stability after annealing at temperatures up to 600 °C followed by anodizing at 500 V, and the specific capacitance of the Nb₂O₅-Al₂O ₃ composite oxide was approximately 27% higher than that of Al ₂O₃ without a Nb₂O₅ layer. The capacitance was quite stable to the resonance frequency. Overall, the Nb ₂O₅-Al₂O₃ composite oxide film is a suitable material for thin film capacitors.

Original language	English
Pages (from-to)	1505-1508
Number of pages	4
Journal	Materials Science and Engineering B
Volume	176
Issue number	18
DOIs	https://doi.org/10.1016/j.mseb.2011.07.021
State	Published - 15 Nov 2011

Keywords

Anodizing
Cathodic electroplating
Thin film capacitor

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10.1016/j.mseb.2011.07.021

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title = "Preparation and characterization of Nb2O5-Al 2O3 composite oxide formed by cathodic electroplating and anodizing",

abstract = "Al foil was coated with niobium oxide by cathodic electroplating and anodized in a neutral boric acid solution to achieve high capacitance in a thin film capacitor. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) revealed the niobium oxide layer on Al to be a hydroxide-rich amorphous phase. The film was crystalline and had stoichiometric stability after annealing at temperatures up to 600 °C followed by anodizing at 500 V, and the specific capacitance of the Nb2O5-Al2O 3 composite oxide was approximately 27\% higher than that of Al 2O3 without a Nb2O5 layer. The capacitance was quite stable to the resonance frequency. Overall, the Nb 2O5-Al2O3 composite oxide film is a suitable material for thin film capacitors.",

keywords = "Anodizing, Cathodic electroplating, Thin film capacitor",

author = "Jang, \{Joo Hee\} and Kim, \{Tae Yoo\} and Kim, \{Nam Jeong\} and Lee, \{Chang Hyoung\} and Park, \{Eun Mi\} and Chan Park and Suh, \{Su Jeong\}",

year = "2011",

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doi = "10.1016/j.mseb.2011.07.021",

language = "English",

volume = "176",

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journal = "Materials Science and Engineering B",

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TY - JOUR

T1 - Preparation and characterization of Nb2O5-Al 2O3 composite oxide formed by cathodic electroplating and anodizing

AU - Jang, Joo Hee

AU - Kim, Tae Yoo

AU - Kim, Nam Jeong

AU - Lee, Chang Hyoung

AU - Park, Eun Mi

AU - Park, Chan

AU - Suh, Su Jeong

PY - 2011/11/15

Y1 - 2011/11/15

N2 - Al foil was coated with niobium oxide by cathodic electroplating and anodized in a neutral boric acid solution to achieve high capacitance in a thin film capacitor. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) revealed the niobium oxide layer on Al to be a hydroxide-rich amorphous phase. The film was crystalline and had stoichiometric stability after annealing at temperatures up to 600 °C followed by anodizing at 500 V, and the specific capacitance of the Nb2O5-Al2O 3 composite oxide was approximately 27% higher than that of Al 2O3 without a Nb2O5 layer. The capacitance was quite stable to the resonance frequency. Overall, the Nb 2O5-Al2O3 composite oxide film is a suitable material for thin film capacitors.

AB - Al foil was coated with niobium oxide by cathodic electroplating and anodized in a neutral boric acid solution to achieve high capacitance in a thin film capacitor. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) revealed the niobium oxide layer on Al to be a hydroxide-rich amorphous phase. The film was crystalline and had stoichiometric stability after annealing at temperatures up to 600 °C followed by anodizing at 500 V, and the specific capacitance of the Nb2O5-Al2O 3 composite oxide was approximately 27% higher than that of Al 2O3 without a Nb2O5 layer. The capacitance was quite stable to the resonance frequency. Overall, the Nb 2O5-Al2O3 composite oxide film is a suitable material for thin film capacitors.

KW - Anodizing

KW - Cathodic electroplating

KW - Thin film capacitor

UR - https://www.scopus.com/pages/publications/80053630733

U2 - 10.1016/j.mseb.2011.07.021

DO - 10.1016/j.mseb.2011.07.021

M3 - Article

AN - SCOPUS:80053630733

SN - 0921-5107

VL - 176

SP - 1505

EP - 1508

JO - Materials Science and Engineering B

JF - Materials Science and Engineering B

IS - 18

ER -

Preparation and characterization of Nb₂O₅-Al ₂O₃ composite oxide formed by cathodic electroplating and anodizing

Abstract

Keywords

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