Preparation and characterization of (Ba0:8Sr0:2)TiO3-Al 2O3 composite oxide for thin film capacitor

Joo Hee Jang; Tae Yoo Kim; Chang Hyoung Lee; Jingjing Zhang; Eun Mi Park; Chan Park; Su Jeong Suh

doi:10.1143/JJAP.50.071502

Preparation and characterization of (Ba0:8Sr0:2)TiO₃-Al ₂O₃ composite oxide for thin film capacitor

Joo Hee Jang
, Tae Yoo Kim
, Chang Hyoung Lee
, Jingjing Zhang
, Eun Mi Park
, Chan Park
, Su Jeong Suh

Department of Advanced Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Barium strontium titanate-alumina composites were fabricated using a sol-gel and anodizing process for high performance thin film capacitors and the properties of the films were studied. The (Ba0:8Sr0:2)TiO₃ (BST) films were formed by spin coating and subsequent annealing at 150- 550 °C. The respective annealed films were anodized in a neutral borate solution. The capacitance density increased with increasing annealing temperature up to 450 °C but decreased at 550 °C. The capacitance density was approximately 28.46% higher with the BST coating than without the BST layer.

Original language	English
Article number	071502
Journal	Japanese Journal of Applied Physics
Volume	50
Issue number	7 PART 1
DOIs	https://doi.org/10.1143/JJAP.50.071502
State	Published - Jul 2011

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title = "Preparation and characterization of (Ba0:8Sr0:2)TiO3-Al 2O3 composite oxide for thin film capacitor",

abstract = "Barium strontium titanate-alumina composites were fabricated using a sol-gel and anodizing process for high performance thin film capacitors and the properties of the films were studied. The (Ba0:8Sr0:2)TiO3 (BST) films were formed by spin coating and subsequent annealing at 150- 550 °C. The respective annealed films were anodized in a neutral borate solution. The capacitance density increased with increasing annealing temperature up to 450 °C but decreased at 550 °C. The capacitance density was approximately 28.46\% higher with the BST coating than without the BST layer.",

author = "Jang, \{Joo Hee\} and Kim, \{Tae Yoo\} and Lee, \{Chang Hyoung\} and Jingjing Zhang and Park, \{Eun Mi\} and Chan Park and Suh, \{Su Jeong\}",

year = "2011",

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doi = "10.1143/JJAP.50.071502",

language = "English",

volume = "50",

journal = "Japanese Journal of Applied Physics",

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T1 - Preparation and characterization of (Ba0:8Sr0:2)TiO3-Al 2O3 composite oxide for thin film capacitor

AU - Jang, Joo Hee

AU - Kim, Tae Yoo

AU - Lee, Chang Hyoung

AU - Zhang, Jingjing

AU - Park, Eun Mi

AU - Park, Chan

AU - Suh, Su Jeong

PY - 2011/7

Y1 - 2011/7

N2 - Barium strontium titanate-alumina composites were fabricated using a sol-gel and anodizing process for high performance thin film capacitors and the properties of the films were studied. The (Ba0:8Sr0:2)TiO3 (BST) films were formed by spin coating and subsequent annealing at 150- 550 °C. The respective annealed films were anodized in a neutral borate solution. The capacitance density increased with increasing annealing temperature up to 450 °C but decreased at 550 °C. The capacitance density was approximately 28.46% higher with the BST coating than without the BST layer.

AB - Barium strontium titanate-alumina composites were fabricated using a sol-gel and anodizing process for high performance thin film capacitors and the properties of the films were studied. The (Ba0:8Sr0:2)TiO3 (BST) films were formed by spin coating and subsequent annealing at 150- 550 °C. The respective annealed films were anodized in a neutral borate solution. The capacitance density increased with increasing annealing temperature up to 450 °C but decreased at 550 °C. The capacitance density was approximately 28.46% higher with the BST coating than without the BST layer.

UR - https://www.scopus.com/pages/publications/79960694881

U2 - 10.1143/JJAP.50.071502

DO - 10.1143/JJAP.50.071502

M3 - Article

AN - SCOPUS:79960694881

SN - 0021-4922

VL - 50

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 7 PART 1

M1 - 071502

ER -

Preparation and characterization of (Ba0:8Sr0:2)TiO₃-Al ₂O₃ composite oxide for thin film capacitor

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