@inproceedings{de1edf491268462fa8d4fb454a81fb86,
title = "Position alignment of micro manipulator using root mean square errors for maskless lithography system",
author = "Ihn, \{Yong Seok\} and Park, \{Sae Whan\} and Koo, \{Ja Choon\}",
year = "2013",
doi = "10.1115/ISPS2013-2943",
language = "English",
isbn = "9780791855539",
series = "ASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013",
booktitle = "ASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013",
note = "ASME 2013 Conference on Information Storage and Processing Systems, ISPS 2013 ; Conference date: 24-06-2013 Through 25-06-2013",
}