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Plasma reactions of N2O on hydrogenated amorphous carbon films by PECVD

  • Y. T. Kim
  • , S. G. Yoon
  • , S. C. Jung
  • , S. J. Suh
  • , D. H. Yoon
  • Sungkyunkwan University
  • Samsung

Research output: Contribution to journal › Article › peer-review

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