Plasma characteristics and antenna electrical characteristics of an internal linear inductively coupled plasma source with a multi-polar magnetic field
- Kyong Nam Kim
- , Jong Hyeuk Lim
- , Jung Kyun Park
- , Geun Young Yeom
- , Sung Hee Lee
- , Jae Koo Lee
- Sungkyunkwan University
- Pohang University of Science and Technology
Research output: Contribution to journal › Article › peer-review
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