TY - JOUR
T1 - Phase and structural evolution of sol-gel synthesized ZrO 2/Si thin films under heat treatment
AU - Hwang, Soo Min
AU - Park, Geun Chul
AU - Lim, Jun Hyung
AU - Joo, Jinho
PY - 2012/7
Y1 - 2012/7
N2 - ZrO 2/Si thin films were fabricated using a sol-gel technique, and the chemical state change and structural evolution from sol to gel to Zr oxide by heat treatment were investigated. The precursor sol was synthesized using a Zr-acetylacetonate (Zr-acac) precursor, spin-coated, dried on Si(100) substrates, and then annealed at 300-700 °C in air. With increased annealing temperature of the sol-gelderived layer, Zr-acac decomposed into Zr-acetate, an amorphous ZrO 2 phase formed, and crystallization into atetragonal phase occurred. In addition, the ZrO 2 layer became denser and the interfacial layer between ZrO 2 and Si thickened, whereas the surface morphology was nearly unaffected and remained smooth with root-mean-square values\4.5 Å
AB - ZrO 2/Si thin films were fabricated using a sol-gel technique, and the chemical state change and structural evolution from sol to gel to Zr oxide by heat treatment were investigated. The precursor sol was synthesized using a Zr-acetylacetonate (Zr-acac) precursor, spin-coated, dried on Si(100) substrates, and then annealed at 300-700 °C in air. With increased annealing temperature of the sol-gelderived layer, Zr-acac decomposed into Zr-acetate, an amorphous ZrO 2 phase formed, and crystallization into atetragonal phase occurred. In addition, the ZrO 2 layer became denser and the interfacial layer between ZrO 2 and Si thickened, whereas the surface morphology was nearly unaffected and remained smooth with root-mean-square values\4.5 Å
UR - https://www.scopus.com/pages/publications/84861201349
U2 - 10.1007/s10853-012-6405-3
DO - 10.1007/s10853-012-6405-3
M3 - Article
AN - SCOPUS:84861201349
SN - 0022-2461
VL - 47
SP - 5216
EP - 5221
JO - Journal of Materials Science
JF - Journal of Materials Science
IS - 13
ER -