Abstract
We have fabricated perpendicular magnetic tunnel junctions consisting of hcp Ru underlayer/hcp CoPt alloy/CoFeB/MgO/CoFeB/CoPt alloy (or Co)/Pt capping layer. By inserting the CoPt alloy (or Co) between the CoFeB and Pt capping layers, it is possible to increase a perpendicular magnetic anisotropy of the top electrode. Using a top electrode of Co 40Fe 40B 20(0.4 nm)/Co 72Pt 28(1.6 nm)/Pt, we have obtained an effective magnetic anisotropy of 3.3 × 10 6 erg/cm 3 and a tunnel magnetoresistance (TMR) of 9.4%. The analysis of the crystal structure reveals that the low TMR is a consequence of the fcc (111) texture of CoFeB layers.
| Original language | English |
|---|---|
| Article number | 6084752 |
| Pages (from-to) | 1130-1133 |
| Number of pages | 4 |
| Journal | IEEE Transactions on Magnetics |
| Volume | 48 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2012 |
| Externally published | Yes |
Keywords
- Magnetic tunnel junctions (MTJs)
- perpendicular magnetic anisotropy (PMA)
- tunnel magnetoresistance (TMR)
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