Patterning of polymer thin films

P. J. Yoo, K. Y. Suh, Y. S. Kim, D. Y. Khang, H. H. Lee

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

3 Scopus citations

Original language	English
Title of host publication	Nanolithography and Patterning Techniques in Microelectronics
Publisher	Elsevier Ltd
Pages	155-183
Number of pages	29
ISBN (Print)	9781855739314
DOIs	https://doi.org/10.1533/9781845690908.155
State	Published - Sep 2005
Externally published	Yes

Access to Document

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title = "Patterning of polymer thin films",

author = "Yoo, \{P. J.\} and Suh, \{K. Y.\} and Kim, \{Y. S.\} and Khang, \{D. Y.\} and Lee, \{H. H.\}",

year = "2005",

month = sep,

doi = "10.1533/9781845690908.155",

language = "English",

isbn = "9781855739314",

pages = "155--183",

booktitle = "Nanolithography and Patterning Techniques in Microelectronics",

publisher = "Elsevier Ltd",

}

TY - CHAP

T1 - Patterning of polymer thin films

AU - Yoo, P. J.

AU - Suh, K. Y.

AU - Kim, Y. S.

AU - Khang, D. Y.

AU - Lee, H. H.

PY - 2005/9

Y1 - 2005/9

UR - https://www.scopus.com/pages/publications/84902613119

U2 - 10.1533/9781845690908.155

DO - 10.1533/9781845690908.155

M3 - Chapter

AN - SCOPUS:84902613119

SN - 9781855739314

SP - 155

EP - 183

BT - Nanolithography and Patterning Techniques in Microelectronics

PB - Elsevier Ltd

ER -