TY - GEN
T1 - Palladium Hydrogen Sensor with Perfectly Aligned and Highly Uniform Nanogap Arrays
AU - Lee, Jae Shin
AU - Chung, Myung Kun
AU - Choi, Kwang Wook
AU - Yoo, Jae Young
AU - Yoon, Jun Bo
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/1
Y1 - 2019/1
N2 - This paper reports a Pd hydrogen gas sensor that uses perfectly aligned uniform nanogap arrays. Depending on the nanogap size, the sensor can differentiate hydrogen concentration thanks to the volume expansion of Pd. The fabrication method of the sensor is based on conventional semiconductor processes; thus, perfectly aligned uniform nanogap arrays can be easily obtained. The standard deviation of the measured nanogap widths was less than 5 nm, and this level of uniformity has not been previously demonstrated in Pd-switching-type sensors. The fabricated sensors with the uniform nanogap array showed abrupt switching characteristics when they were exposed to H2 concentrations over a certain threshold level. Furthermore, based on the unprecedented high uniformity of the nanogap widths, a fine modulation of the threshold level of the H2 concentrations was firstly demonstrated.
AB - This paper reports a Pd hydrogen gas sensor that uses perfectly aligned uniform nanogap arrays. Depending on the nanogap size, the sensor can differentiate hydrogen concentration thanks to the volume expansion of Pd. The fabrication method of the sensor is based on conventional semiconductor processes; thus, perfectly aligned uniform nanogap arrays can be easily obtained. The standard deviation of the measured nanogap widths was less than 5 nm, and this level of uniformity has not been previously demonstrated in Pd-switching-type sensors. The fabricated sensors with the uniform nanogap array showed abrupt switching characteristics when they were exposed to H2 concentrations over a certain threshold level. Furthermore, based on the unprecedented high uniformity of the nanogap widths, a fine modulation of the threshold level of the H2 concentrations was firstly demonstrated.
UR - https://www.scopus.com/pages/publications/85074324300
U2 - 10.1109/MEMSYS.2019.8870836
DO - 10.1109/MEMSYS.2019.8870836
M3 - Conference contribution
AN - SCOPUS:85074324300
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 496
EP - 499
BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Y2 - 27 January 2019 through 31 January 2019
ER -