Origin of operating voltage increase in deep UV light-emitting diodes with ITO/Al reflector

In an attempt to further elucidate the operating voltage increase in a vertical UV-C LED with p-electrode composed of transparent conducting Sn-doped indium oxide (ITO)/Al reflector, the interface formation between ITO and Al thin film was studied by using scanning transmission electron microscopy in combination with electron energy loss spectroscopy. It was confirmed that the oxidized layer was formed at the interface of the ITO/Al electrode in accordance with the thermal annealing. It was found that not only the thickness of oxide formation grew with the increased annealing temperature, the content of oxygen also increased. Moreover, it was also ascertained that the prolonged annealing time at high temperature induced the indium diffusion into the Al-oxide layer.