Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO3 electrode

Hanjong Paik; Jongin Hong; Young Ah Jeon; Sung Kwan Kim; Yunseok Kim; Youngha Kim; Yang Soo Kim; Kwangsoo No

doi:10.1080/10584580500413442

Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO₃ electrode

Hanjong Paik
, Jongin Hong
, Young Ah Jeon
, Sung Kwan Kim
, Yunseok Kim
, Youngha Kim
, Yang Soo Kim
, Kwangsoo No

Korea Advanced Institute of Science and Technology

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

In this study, we report on the (100) cube-textured Pb(Zr _0.4,Ti_0.6)O₃ (PZT) thin films using a conducting perovskite CaRuO₃ (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (P_r) and coercive field (E_c) of 25 μC/cm² and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.

Original language	English
Pages (from-to)	115-121
Number of pages	7
Journal	Integrated Ferroelectrics
Volume	75
DOIs	https://doi.org/10.1080/10584580500413442
State	Published - 2005
Externally published	Yes
Event	Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17 - Shanghai, China Duration: 17 Apr 2005 → 20 Apr 2005

Keywords

Conductive perovskite oxide
Fatigue improvement
Film orientation
Si substrate

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10.1080/10584580500413442

Cite this

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title = "Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO3 electrode",

abstract = "In this study, we report on the (100) cube-textured Pb(Zr 0.4,Ti0.6)O3 (PZT) thin films using a conducting perovskite CaRuO3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (Pr) and coercive field (Ec) of 25 μC/cm2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.",

keywords = "Conductive perovskite oxide, Fatigue improvement, Film orientation, Si substrate",

author = "Hanjong Paik and Jongin Hong and Jeon, \{Young Ah\} and Kim, \{Sung Kwan\} and Yunseok Kim and Youngha Kim and Kim, \{Yang Soo\} and Kwangsoo No",

year = "2005",

doi = "10.1080/10584580500413442",

language = "English",

volume = "75",

pages = "115--121",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

note = "Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17 ; Conference date: 17-04-2005 Through 20-04-2005",

}

TY - JOUR

T1 - Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO3 electrode

AU - Paik, Hanjong

AU - Hong, Jongin

AU - Jeon, Young Ah

AU - Kim, Sung Kwan

AU - Kim, Yunseok

AU - Kim, Youngha

AU - Kim, Yang Soo

AU - No, Kwangsoo

PY - 2005

Y1 - 2005

N2 - In this study, we report on the (100) cube-textured Pb(Zr 0.4,Ti0.6)O3 (PZT) thin films using a conducting perovskite CaRuO3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (Pr) and coercive field (Ec) of 25 μC/cm2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.

AB - In this study, we report on the (100) cube-textured Pb(Zr 0.4,Ti0.6)O3 (PZT) thin films using a conducting perovskite CaRuO3 (CRO) bottom electrode, and which was compared to the (111) textured PZT on Pt electrode. X-ray diffraction (XRD) reveals that the CRO bottom electrode has a pseudo-cubic nature on Si, and the PZT thin films prepared on CRO/Si shows a (100) textured growth. PZT films on CRO electrode have a well-saturated ferroelectricity with a remanent polarization (Pr) and coercive field (Ec) of 25 μC/cm2 and 75 kV/cm, respectively. These PZT films are more fatigue resistive character than that on Pt bottom electrode.

KW - Conductive perovskite oxide

KW - Fatigue improvement

KW - Film orientation

KW - Si substrate

UR - https://www.scopus.com/pages/publications/33645505807

U2 - 10.1080/10584580500413442

DO - 10.1080/10584580500413442

M3 - Conference article

AN - SCOPUS:33645505807

SN - 1058-4587

VL - 75

SP - 115

EP - 121

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

T2 - Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17

Y2 - 17 April 2005 through 20 April 2005

ER -

Orientation and fatigue improvement of PZT thin films on cubic textured CaRuO₃ electrode

Abstract

Keywords

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