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Optimizing a blend of a mixture slurry in chemical mechanical planarization for advanced semiconductor manufacturing using a posterior preference articulation approach to dual response surface optimization

  • Jihoon Seo
  • , Dong Hee Lee
  • , Kangchun Lee
  • , Kijung Kim
  • , Kwang Jae Kim
  • Hanyang University
  • Pohang University of Science and Technology

Research output: Contribution to journal › Article › peer-review

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