Skip to main navigation Skip to search Skip to main content

Optimization of CMP process for TSV reveal in consideration of critical defect

  • Donghoon Lee
  • , Dohyeong Kim
  • , Seungchul Han
  • , Joohyun Kim
  • , Jungsoo Park
  • , Bora Jang
  • , Youngsuk Chung
  • , Seongmin Seo
  • , Yongsang Kim
  • , Choonheung Lee
  • Amkor Technology
  • Sungkyunkwan University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3   Link opens in a new tab Scopus citations

Fingerprint

Dive into the research topics of 'Optimization of CMP process for TSV reveal in consideration of critical defect'. Together they form a unique fingerprint.
Sort by

Engineering