@inproceedings{dec564fd081349d09c6b12dfd0872b3f,
title = "OLED micropatterning by plasma etch",
abstract = "The micropatterning of OLED by plasma etch was investigated. The luminescence of patterned OLED micropixels was evaluated when the pixels were fabricated by photolithography and plasma etch. It was confirmed that the OLED micropixels could be fabricated by plasma etch if there is no damage on the organic material. The damage of organic material was caused by oxygen and ozone during the process. In this study, we proposed a novel method of OLED micropatterning that could be applied to fabrication of an OLED panel.",
keywords = "Micropatterning, Plasma etch",
author = "Cho, \{Jae Wan\} and Kim, \{Chan ho\} and Jeon, \{Sang Eon\} and Cho, \{Sung Min\}",
note = "Publisher Copyright: {\textcopyright} 2019 ITE and SID.; 26th International Display Workshops, IDW 2019 ; Conference date: 27-11-2019 Through 29-11-2019",
year = "2019",
language = "English",
series = "Proceedings of the International Display Workshops",
publisher = "International Display Workshops",
pages = "930--932",
booktitle = "26th International Display Workshops, IDW 2019",
address = "Japan",
}