Observation of oxide precipitates in InN nanostructures

Soon Yong Kwon, Zaiyuan Ren, Qian Sun, Jung Han, Young Woon Kim, Euijoon Yoon, Bo Hyun Kong, Hyung Koun Cho, Il Joong Kim, Hyeonsik Cheong

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

We observed the formation of oxide precipitates (bcc- In2 O3) in InN nanostructures formed during metal-organic chemical vapor deposition (MOCVD) and/or subsequent postgrowth procedures in H2 ambient. It was found that InN is extremely unstable in H2 ambient and the activation energy of N2 desorption of InN is measured to be ∼0.28 eV, which is one order of magnitude smaller than that of reported value of InN in vacuum. Instability of InN nanostructures under H2 ambient together with residual oxidant in the reactor facilitates the formation of indium oxide precipitates in the nanostructure matrix during MOCVD or the oxidation of residual indium at the surface, resulting in indium oxide dots.

Original languageEnglish
Article number234102
JournalApplied Physics Letters
Volume91
Issue number23
DOIs
StatePublished - 2007

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