Novel Method of Measuring the Thickness of Nanoscale Films Using Energy Dispersive X-Ray Spectroscopy Line Scan Profiles
- Min Chul Kang
- , Jin Su Oh
- , Kyeong Youn Song
- , Hoo Jeong Lee
- , Hionsuck Baik
- , Cheol Woong Yang
- Sungkyunkwan University
- Korea Basic Science Institute
Research output: Contribution to journal › Article › peer-review
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