Novel fabrication techniques for ultra-thin silicon based flexible electronics

  • Ju Young Lee
  • , Jeong Eun Ju
  • , Chanwoo Lee
  • , Sang Min Won
  • , Ki Jun Yu

Research output: Contribution to journalReview articlepeer-review

32 Scopus citations

Abstract

Highlights Flexible silicon manufacturing techniques are categorized into two main approaches: top-down and bottom-up depending on the process sequence. The top-down approach is a method of producing the bulk silicon wafer by scaling down it into nano/micro-sized structures. The bottom-up approach is a method of creating an intricate structure through precise control of small-scale atoms and molecules. Flexible silicon maintains the advantages of the bulk silicon such as electrical properties, reliability, and cost-effectiveness.

Original languageEnglish
Article number042005
JournalInternational Journal of Extreme Manufacturing
Volume6
Issue number4
DOIs
StatePublished - Aug 2024
Externally publishedYes

Keywords

  • bottom-up approach
  • flexible electronics
  • silicon fabrication technique
  • top-down approach

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