Near 100°C low temperature a-Si TFT array fabrication on 7 inch flexible PES substrates

Ivan V. Nikulin; Tae Hyung Hwang; Hyung Il Jeon; Sang Il Kim; Nam Seok Roh; Seong Sik Shin

Near 100°C low temperature a-Si TFT array fabrication on 7 inch flexible PES substrates

Ivan V. Nikulin
, Tae Hyung Hwang
, Hyung Il Jeon
, Sang Il Kim
, Nam Seok Roh
, Seong Sik Shin

Samsung

Research output: Contribution to journal › Conference article › peer-review

Abstract

High-quality a-Si TFTs were fabricated on 7 inch plastic PES substrates at 130°C and 100°C. It had been shown that the key factor for successful TFT fabrication on the relatively large plastic substrates is thorough control of total active layer's stress by means of deposition temperature, reduction and single layer's intrinsic stress optimization.

Original language	English
Pages (from-to)	434-437
Number of pages	4
Journal	Proceedings of International Meeting on Information Display
Volume	2006
State	Published - 2006
Externally published	Yes
Event	IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference - Daegu, Korea, Republic of Duration: 22 Aug 2006 → 25 Aug 2006

Cite this

@article{92ebf06a5f0f45b3b9736a2850a5631a,

title = "Near 100°C low temperature a-Si TFT array fabrication on 7 inch flexible PES substrates",

abstract = "High-quality a-Si TFTs were fabricated on 7 inch plastic PES substrates at 130°C and 100°C. It had been shown that the key factor for successful TFT fabrication on the relatively large plastic substrates is thorough control of total active layer's stress by means of deposition temperature, reduction and single layer's intrinsic stress optimization.",

author = "Nikulin, \{Ivan V.\} and Hwang, \{Tae Hyung\} and Jeon, \{Hyung Il\} and Kim, \{Sang Il\} and Roh, \{Nam Seok\} and Shin, \{Seong Sik\}",

year = "2006",

language = "English",

volume = "2006",

pages = "434--437",

journal = "Proceedings of International Meeting on Information Display",

issn = "1738-7558",

note = "IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference ; Conference date: 22-08-2006 Through 25-08-2006",

}

TY - JOUR

T1 - Near 100°C low temperature a-Si TFT array fabrication on 7 inch flexible PES substrates

AU - Nikulin, Ivan V.

AU - Hwang, Tae Hyung

AU - Jeon, Hyung Il

AU - Kim, Sang Il

AU - Roh, Nam Seok

AU - Shin, Seong Sik

PY - 2006

Y1 - 2006

N2 - High-quality a-Si TFTs were fabricated on 7 inch plastic PES substrates at 130°C and 100°C. It had been shown that the key factor for successful TFT fabrication on the relatively large plastic substrates is thorough control of total active layer's stress by means of deposition temperature, reduction and single layer's intrinsic stress optimization.

AB - High-quality a-Si TFTs were fabricated on 7 inch plastic PES substrates at 130°C and 100°C. It had been shown that the key factor for successful TFT fabrication on the relatively large plastic substrates is thorough control of total active layer's stress by means of deposition temperature, reduction and single layer's intrinsic stress optimization.

UR - https://www.scopus.com/pages/publications/33846158807

M3 - Conference article

AN - SCOPUS:33846158807

SN - 1738-7558

VL - 2006

SP - 434

EP - 437

JO - Proceedings of International Meeting on Information Display

JF - Proceedings of International Meeting on Information Display

T2 - IMID/IDMC 2006: 6th Internaional Meeting on Information Display and the 5th International Display Manufacturing Conference

Y2 - 22 August 2006 through 25 August 2006

ER -

Near 100°C low temperature a-Si TFT array fabrication on 7 inch flexible PES substrates

Abstract

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