Nanostructures fabrication on Ta thin film using atomic force microscope lithography

Sunwoo Lee; Haiwon Lee; Do Haing Lee; Byung Jae Park; Geun Young Yeom

doi:10.1080/15421400500369484

Nanostructures fabrication on Ta thin film using atomic force microscope lithography

Sunwoo Lee
, Haiwon Lee
, Do Haing Lee
, Byung Jae Park
, Geun Young Yeom

Department of Advanced Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Atomic force microscope (AFM) lithography based on localized current injection was carried out for fabricating nanostructures of metal oxide on tantalum (Ta). Fabricated nanopatterns of tantalum oxide (Ta 2 O 5 ) were selectively etched by magnetically enhanced inductively coupled plasma (MEICP) etching system. Nanopatterns of Ta with feature size in the range of a few tens-hundreds nm were successfully fabricated.

Original language	English
Pages (from-to)	115/[405]-118/[408]
Journal	Molecular Crystals and Liquid Crystals
Volume	445
DOIs	https://doi.org/10.1080/15421400500369484
State	Published - 2006

Keywords

Atomic force microscope (AFM) lithography
Etching
Nanopattern
Ta

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10.1080/15421400500369484

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title = "Nanostructures fabrication on Ta thin film using atomic force microscope lithography",

abstract = "Atomic force microscope (AFM) lithography based on localized current injection was carried out for fabricating nanostructures of metal oxide on tantalum (Ta). Fabricated nanopatterns of tantalum oxide (Ta 2 O 5 ) were selectively etched by magnetically enhanced inductively coupled plasma (MEICP) etching system. Nanopatterns of Ta with feature size in the range of a few tens-hundreds nm were successfully fabricated.",

keywords = "Atomic force microscope (AFM) lithography, Etching, Nanopattern, Ta",

author = "Sunwoo Lee and Haiwon Lee and Lee, \{Do Haing\} and Park, \{Byung Jae\} and Yeom, \{Geun Young\}",

year = "2006",

doi = "10.1080/15421400500369484",

language = "English",

volume = "445",

pages = "115/[405]--118/[408]",

journal = "Molecular Crystals and Liquid Crystals",

issn = "1542-1406",

publisher = "Taylor and Francis Ltd.",

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T1 - Nanostructures fabrication on Ta thin film using atomic force microscope lithography

AU - Lee, Sunwoo

AU - Lee, Haiwon

AU - Lee, Do Haing

AU - Park, Byung Jae

AU - Yeom, Geun Young

PY - 2006

Y1 - 2006

N2 - Atomic force microscope (AFM) lithography based on localized current injection was carried out for fabricating nanostructures of metal oxide on tantalum (Ta). Fabricated nanopatterns of tantalum oxide (Ta 2 O 5 ) were selectively etched by magnetically enhanced inductively coupled plasma (MEICP) etching system. Nanopatterns of Ta with feature size in the range of a few tens-hundreds nm were successfully fabricated.

AB - Atomic force microscope (AFM) lithography based on localized current injection was carried out for fabricating nanostructures of metal oxide on tantalum (Ta). Fabricated nanopatterns of tantalum oxide (Ta 2 O 5 ) were selectively etched by magnetically enhanced inductively coupled plasma (MEICP) etching system. Nanopatterns of Ta with feature size in the range of a few tens-hundreds nm were successfully fabricated.

KW - Atomic force microscope (AFM) lithography

KW - Etching

KW - Nanopattern

KW - Ta

UR - https://www.scopus.com/pages/publications/33745003263

U2 - 10.1080/15421400500369484

DO - 10.1080/15421400500369484

M3 - Article

AN - SCOPUS:33745003263

SN - 1542-1406

VL - 445

SP - 115/[405]-118/[408]

JO - Molecular Crystals and Liquid Crystals

JF - Molecular Crystals and Liquid Crystals

ER -

Nanostructures fabrication on Ta thin film using atomic force microscope lithography

Abstract

Keywords

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