Nanoindentation of Ni-Ti thin films

Ni-Ti thin films of various compositions were sputtered-deposited on silicon substrates. Their mechanical properties (hardness and Young's modulus) were then determined using a nanoindenter equipped with a Berkovich tip. This paper examines the effects of composition on the mechanical properties (hardness and Young's modulus) of the sputter deposited Ni-Ti thin films. This is of particular interest since the actuation properties of these shape memory alloy films are compositionally sensitive. The surface-induced deformation is revealed via Atomic Force Microscopy (AFM) images of the indented surfaces. Which show evidence of material pile-up that increases with increasing load. The measured Young's moduli are also shown to provide qualitative measures of the extent of stress-induced phase transformation in small volumes of Ni-Ti films.