Abstract
Thin InGaN layers were grown using metalorganic chemical vapor deposition and were characterized using atomic force microscopy and high-resolution transmission electron microscopy. InGaN on GaN exhibits a Stranski-Krastanov growth mode, including a 2D wetting layer and 3D self-assembled quantum dots. We also observed that the InGaN nano-scale dots had a truncated cone shape with {1-102} facets with respect to the (0002) surface. A visible spectral range from UV to green was easily obtained by changing the InGaN quantum well thickness up to 2.3 nm.
| Original language | English |
|---|---|
| Pages (from-to) | 141-146 |
| Number of pages | 6 |
| Journal | Journal of the Korean Physical Society |
| Volume | 39 |
| Issue number | 1 |
| State | Published - Jul 2001 |
| Externally published | Yes |
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