@inproceedings{5471bc8d2b2843379381c768ac8fce8c,
title = "Nano-pore arrays of anodic aluminum oxide fabricated using a Cr mask",
abstract = "Nano-pore array of AAO were not formed in Cr and SiO2 mask patterned area while these arrays were formed in the unpatterned areas. These arrays arranged along the line edge of Cr mask pattern, as shown in Fig. 2. It was considered that current density increased at edge of Cr pattern due to the formation of Al2O3 at unpatterned Al surface by anodizing. Fig. 3 shows SEM image of AAO anodized under anodizing voltage of 5V and 8V. Nano-pores were formed in both patterned and unpatterned areas at relatively high voltage. Fig. 4 shows that the variation of nano-pore arrays with the size of exposed Al surface and edge effect decreased.",
author = "Jeong, \{G. H.\} and Lim, \{S. K.\} and Park, \{J. K.\} and D. Lee and Lee, \{B. K.\} and Suh, \{S. J.\}",
year = "2007",
doi = "10.1109/IMNC.2007.4456169",
language = "English",
isbn = "4990247248",
series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
pages = "192--193",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",
}