MXene Electrode for the Integration of WSe₂ and MoS₂ Field Effect Transistors

Recently, MXenes, which are 2D early transition metal carbides and carbonitrides, have attracted wide attention because of their excellent conductivities. Here, the electrode applications of Ti₂C(OH)_xF_y, one member of the MXene family, in WSe₂ and MoS₂ field effect transistors (FETs) are assessed. Kelvin probe force microscopy analysis is performed to determine its work function, which is estimated to be ≈4.98 eV. Devices based on WSe₂/Ti₂C(OH)_xF_y and MoS₂/Ti₂C(OH)_xF_y heterostructures are fabricated with the mechanical transfer method and their electronic performances evaluated. The temperature-dependent current–voltage transfer characteristics of the devices are determined to extract their Schottky barrier heights. The hole barrier between WSe₂ and Ti₂C(OH)_xF_y is estimated to be ≈0.23 eV and the electron barrier between the MoS₂ band and Ti₂C(OH)_xF_y is ≈0.19 eV, which indicates that the pinning effect occurs at the MoS₂/Ti₂C(OH)_xF_y interface but not at the WSe₂/Ti₂C(OH)_xF_y interface; this difference arises because of the difference between the band structures of WSe₂ and MoS₂. A complementary metal–oxide–semiconductor inverter based on these electrode properties of Ti₂C(OH)_xF_y with MoS₂ (n-channel) and WSe₂ (p-channel) is fabricated, which demonstrates that Ti₂C(OH)_xF_y is a promising electrode for future nanoelectronics applications.