@inproceedings{897e3285d9b14d4a96eaddedaedead10,
title = "Monolithic integration of oxides on semiconductors",
abstract = "Integration of functional oxides with semiconductors opens ways of creating novel hybrid architectures. However, epitaxy of these different types of materials brings challenges unlike those encountered in traditional semiconductor epitaxy. In this paper we will discuss our recent work on monolithic integration of perovskite oxides SrTiO3 and BaTiO 3 on Si(001) and Ge(001), and the use of these pseudosubstrates to integrate other functional oxides using molecular beam epitaxy (MBE) and atomic layer deposition (ALD).",
author = "Demkov, \{Alexander A.\} and Posadas, \{Agham B.\} and Hosung Seo and Miri Choi and Kormondy, \{Kristy J.\} and Patrick Ponath and Hatch, \{Richard C.\} and McDaniel, \{Martin D.\} and Ngo, \{Thong Q.\} and Ekerdt, \{John G.\}",
year = "2013",
doi = "10.1149/05401.0255ecst",
language = "English",
isbn = "9781607684435",
series = "ECS Transactions",
number = "1",
pages = "255--269",
booktitle = "2013 International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT 4",
edition = "1",
note = "4th International Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors, ULSIC vs. TFT 2013 ; Conference date: 07-07-2013 Through 12-07-2013",
}