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Moisture barrier properties of low-temperature atomic layer deposited Al2O3 using various oxidants

  • Taewook Nam
  • , Haksoo Lee
  • , Seunggi Seo
  • , Sung Min Cho
  • , Bonggeun Shong
  • , Han Bo Ram Lee
  • , Hyungjun Kim

Research output: Contribution to journal › Article › peer-review

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