Abstract
The heterodyne laser interferometer has been widely used in the field of precise measurements. The limited measurement accuracy of a heterodyne laser interferometer arises from the periodic nonlinearity caused by non-ideal laser sources and imperfect optical components. In this paper, the iterated dual-EKF algorithm is used to compensate for the error caused by nonlinearity and external noise. With the iterated dual-EKF algorithm, the weight filter estimates the parameter uncertainties in the state equation caused by nonlinearity errors and has a high convergence rate of weight values due to the iteration process. To verify the performance of the proposed compensation algorithm, we present experimental results obtained by using the iterated dual-EKF algorithm and compare them with the results obtained by using a capacitance displacement sensor.
| Original language | English |
|---|---|
| Pages (from-to) | 689-695 |
| Number of pages | 7 |
| Journal | Journal of the Korean Physical Society |
| Volume | 57 |
| Issue number | 4 |
| DOIs | |
| State | Published - 15 Oct 2010 |
Keywords
- Dual-extended kalman filter
- Error compensation
- Heterodyne laser interferometer
- Measurement accuracy
- Nonlinearity
Fingerprint
Dive into the research topics of 'Mixed error compensation in a heterodyne interferometer using the iterated Dual-EKF algorithm'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver