Measurement of Young's moduli for film and substrate by the mechanical resonance method

Y. H. Lee; Y. D. Shin; K. H. Lee; J. R. Rhee

doi:10.1063/1.355510

Measurement of Young's moduli for film and substrate by the mechanical resonance method

Y. H. Lee, Y. D. Shin, K. H. Lee, J. R. Rhee

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3 Scopus citations

Abstract

Young's moduli for films and substrates are obtained by measurement and theoretical analysis of the resonance frequencies for cantilevered substrates with and without films in the flexural vibration mode. Young's moduli of 7.1, 19.2, and 21.3×10¹⁰ Pa obtained for the glass substrate, Ni, and Ni₅₃Fe₄₇ films agree with the published values for bulk material within 10%. Decrease of the resonance curve Q value is observed for substrates with films, which implies an increase of internal friction.

Original language	English
Pages (from-to)	5913-5915
Number of pages	3
Journal	Journal of Applied Physics
Volume	75
Issue number	10
DOIs	https://doi.org/10.1063/1.355510
State	Published - 1994
Externally published	Yes

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title = "Measurement of Young's moduli for film and substrate by the mechanical resonance method",

abstract = "Young's moduli for films and substrates are obtained by measurement and theoretical analysis of the resonance frequencies for cantilevered substrates with and without films in the flexural vibration mode. Young's moduli of 7.1, 19.2, and 21.3×1010 Pa obtained for the glass substrate, Ni, and Ni53Fe47 films agree with the published values for bulk material within 10\%. Decrease of the resonance curve Q value is observed for substrates with films, which implies an increase of internal friction.",

author = "Lee, \{Y. H.\} and Shin, \{Y. D.\} and Lee, \{K. H.\} and Rhee, \{J. R.\}",

year = "1994",

doi = "10.1063/1.355510",

language = "English",

volume = "75",

pages = "5913--5915",

journal = "Journal of Applied Physics",

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publisher = "American Institute of Physics",

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T1 - Measurement of Young's moduli for film and substrate by the mechanical resonance method

AU - Lee, Y. H.

AU - Shin, Y. D.

AU - Lee, K. H.

AU - Rhee, J. R.

PY - 1994

Y1 - 1994

N2 - Young's moduli for films and substrates are obtained by measurement and theoretical analysis of the resonance frequencies for cantilevered substrates with and without films in the flexural vibration mode. Young's moduli of 7.1, 19.2, and 21.3×1010 Pa obtained for the glass substrate, Ni, and Ni53Fe47 films agree with the published values for bulk material within 10%. Decrease of the resonance curve Q value is observed for substrates with films, which implies an increase of internal friction.

AB - Young's moduli for films and substrates are obtained by measurement and theoretical analysis of the resonance frequencies for cantilevered substrates with and without films in the flexural vibration mode. Young's moduli of 7.1, 19.2, and 21.3×1010 Pa obtained for the glass substrate, Ni, and Ni53Fe47 films agree with the published values for bulk material within 10%. Decrease of the resonance curve Q value is observed for substrates with films, which implies an increase of internal friction.

UR - https://www.scopus.com/pages/publications/0008912288

U2 - 10.1063/1.355510

DO - 10.1063/1.355510

M3 - Article

AN - SCOPUS:0008912288

SN - 0021-8979

VL - 75

SP - 5913

EP - 5915

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 10

ER -

Measurement of Young's moduli for film and substrate by the mechanical resonance method

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