TY - GEN
T1 - Material-independent nanowire-transfer method based on mechanical interlocking for high performance flexible devices
AU - Seo, Min Ho
AU - Park, Sanghyun
AU - Yoo, Jae Young
AU - Lim, Sungkyu
AU - Jo, Min Seung
AU - Choi, Kwang Wook
AU - Lee, Jae Shin
AU - Kim, Soo Bon
AU - Yoon, Jun Bo
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - This paper reports a novel transfer method to fabricate ultralong, fully aligned nanowires, made of diverse materials on a flexible substrate. For the uniform transfer of nanowires made from a wide range of materials, a facile and robust mechanics-based nano-transfer method has been developed. A selectively dry-removable amorphous carbon nano-sacrificial layer between a vacuum-deposited nanowire and the underlying master mold is newly introduced, and it facilitates the robust and reliable mechanical transfer of dense and aligned nanowires onto a flexible substrate. Using the developed method, we first fabricated ultralong and fully aligned metal/metal-oxide (gold, platinum, and copper-oxide) nanowires on a large-area flexible substrate (2.5 × 2 cm2). We also fabricated a unique nanowire-heater-embedded gas-sensor using the transferred gold and copper-oxide nanowires, respectively. The developed heater-embedded device exhibited a 33-fold enhancement in sensitivity, responding to 10 ppm NO2 using a 0.6 V heater bias.
AB - This paper reports a novel transfer method to fabricate ultralong, fully aligned nanowires, made of diverse materials on a flexible substrate. For the uniform transfer of nanowires made from a wide range of materials, a facile and robust mechanics-based nano-transfer method has been developed. A selectively dry-removable amorphous carbon nano-sacrificial layer between a vacuum-deposited nanowire and the underlying master mold is newly introduced, and it facilitates the robust and reliable mechanical transfer of dense and aligned nanowires onto a flexible substrate. Using the developed method, we first fabricated ultralong and fully aligned metal/metal-oxide (gold, platinum, and copper-oxide) nanowires on a large-area flexible substrate (2.5 × 2 cm2). We also fabricated a unique nanowire-heater-embedded gas-sensor using the transferred gold and copper-oxide nanowires, respectively. The developed heater-embedded device exhibited a 33-fold enhancement in sensitivity, responding to 10 ppm NO2 using a 0.6 V heater bias.
UR - https://www.scopus.com/pages/publications/85047016069
U2 - 10.1109/MEMSYS.2018.8346474
DO - 10.1109/MEMSYS.2018.8346474
M3 - Conference contribution
AN - SCOPUS:85047016069
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 33
EP - 36
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -