Magnetic field designs for cylindrical-post magnetron discharge sources

Research output: Contribution to journal › Comment/debate

9 Scopus citations

Original language	English
Pages (from-to)	3156-3158
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	6
Issue number	6
DOIs	https://doi.org/10.1116/1.575048
State	Published - Nov 1988
Externally published	Yes

Access to Document

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title = "Magnetic field designs for cylindrical-post magnetron discharge sources",

author = "Yeom, \{G. Y.\} and Thornton, \{John A.\} and Penfold, \{Alan S.\}",

year = "1988",

month = nov,

doi = "10.1116/1.575048",

language = "English",

volume = "6",

pages = "3156--3158",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Magnetic field designs for cylindrical-post magnetron discharge sources

AU - Yeom, G. Y.

AU - Thornton, John A.

AU - Penfold, Alan S.

PY - 1988/11

Y1 - 1988/11

UR - https://www.scopus.com/pages/publications/0007146493

U2 - 10.1116/1.575048

DO - 10.1116/1.575048

M3 - Comment/debate

AN - SCOPUS:0007146493

SN - 0734-2101

VL - 6

SP - 3156

EP - 3158

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 6

ER -