Magnetic Enhanced Inductively Coupled Plasma Etching of 6H-SiC
- D. W. Kim
- , H. Y. Lee
- , H. S. Kim
- , Y. J. Sung
- , S. H. Chae
- , G. Y. Yeom
- Sungkyunkwan University
- Samsung
Research output: Contribution to journal › Conference article › peer-review
Research output: Contribution to journal › Conference article › peer-review