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Low temperature boron activation in amorphous germanium for three dimensional integrated circuits (3D-ICs) using Ni-induced crystallization

  • Jin Hong Park
  • , M. Tada
  • , H. Y. Yu
  • , D. Kuzum
  • , Y. Na
  • , K. C. Saraswat
  • Stanford University
  • NEC Corporation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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