Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing
- K. N. Kim
- , S. J. Jung
- , Y. J. Lee
- , G. Y. Yeom
- , S. H. Lee
- , J. K. Lee
- Sungkyunkwan University
- Pohang University of Science and Technology
Research output: Contribution to journal › Article › peer-review
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