Linear inductive antenna design for large area flat panel display plasma processing
- K. N. Kim
- , J. H. Lim
- , H. B. Jeong
- , G. Y. Yeom
- , S. H. Lee
- , J. K. Lee
- Sungkyunkwan University
- Pohang University of Science and Technology
Research output: Contribution to journal › Article › peer-review
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