Large arrays and properties of 3-terminal graphene nanoelectromechanical switches

Xinghui Liu; Ji Won Suk; Narasimha G. Boddeti; Lauren Cantley; Luda Wang; Jason M. Gray; Harris J. Hall; Victor M. Bright; Charles T. Rogers; Martin L. Dunn; Rodney S. Ruoff; J. Scott Bunch

doi:10.1002/adma.201304949

Large arrays and properties of 3-terminal graphene nanoelectromechanical switches

Xinghui Liu
, Ji Won Suk
, Narasimha G. Boddeti
, Lauren Cantley
, Luda Wang
, Jason M. Gray
, Harris J. Hall
, Victor M. Bright
, Charles T. Rogers
, Martin L. Dunn
, Rodney S. Ruoff
, J. Scott Bunch

Research output: Contribution to journal › Article › peer-review

58 Scopus citations

Abstract

Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.

Original language	English
Pages (from-to)	1571-1576
Number of pages	6
Journal	Advanced Materials
Volume	26
Issue number	10
DOIs	https://doi.org/10.1002/adma.201304949
State	Published - 12 Mar 2014
Externally published	Yes

Keywords

finite element analysis
graphene
microsystems
nanoelectromechanical systems
nanomechanical switches

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10.1002/adma.201304949

Cite this

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title = "Large arrays and properties of 3-terminal graphene nanoelectromechanical switches",

abstract = "Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.",

keywords = "finite element analysis, graphene, microsystems, nanoelectromechanical systems, nanomechanical switches",

author = "Xinghui Liu and Suk, \{Ji Won\} and Boddeti, \{Narasimha G.\} and Lauren Cantley and Luda Wang and Gray, \{Jason M.\} and Hall, \{Harris J.\} and Bright, \{Victor M.\} and Rogers, \{Charles T.\} and Dunn, \{Martin L.\} and Ruoff, \{Rodney S.\} and Bunch, \{J. Scott\}",

year = "2014",

month = mar,

day = "12",

doi = "10.1002/adma.201304949",

language = "English",

volume = "26",

pages = "1571--1576",

journal = "Advanced Materials",

issn = "0935-9648",

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TY - JOUR

T1 - Large arrays and properties of 3-terminal graphene nanoelectromechanical switches

AU - Liu, Xinghui

AU - Suk, Ji Won

AU - Boddeti, Narasimha G.

AU - Cantley, Lauren

AU - Wang, Luda

AU - Gray, Jason M.

AU - Hall, Harris J.

AU - Bright, Victor M.

AU - Rogers, Charles T.

AU - Dunn, Martin L.

AU - Ruoff, Rodney S.

AU - Bunch, J. Scott

PY - 2014/3/12

Y1 - 2014/3/12

N2 - Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.

AB - Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.

KW - finite element analysis

KW - graphene

KW - microsystems

KW - nanoelectromechanical systems

KW - nanomechanical switches

UR - https://www.scopus.com/pages/publications/84896753879

U2 - 10.1002/adma.201304949

DO - 10.1002/adma.201304949

M3 - Article

AN - SCOPUS:84896753879

SN - 0935-9648

VL - 26

SP - 1571

EP - 1576

JO - Advanced Materials

JF - Advanced Materials

IS - 10

ER -

Large arrays and properties of 3-terminal graphene nanoelectromechanical switches

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Keywords

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