Investigation of the plasma uniformity in an internal linear antenna-type inductively coupled plasma source by applying dual frequency
- Gwang Ho Gweon
- , Jong Hyeuk Lim
- , Kyong Nam Kim
- , Seung Pyo Hong
- , Tae Hong Min
- , Geun Young Yeom
- Sungkyunkwan University
Research output: Contribution to journal › Article › peer-review
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