Abstract
We investigate the effects of length (L) and width (W) scaling on the low-frequency noise characteristics of the ferroelectric tunnel junction (FTJ). The FTJ is composed of metal/ferroelectric/dielectric/semicondu- ctor (TiN/HfZrO2/SiO2/n+ Si). In the high-resistance state, 1/f noise increases proportionally to 1/Wα Lβ (α ≅ 1, β > 1), whereas the shot noise has no scaling dependence. In the low-resistance state, the 1/f noise of the FTJ shows a more sensitive dependence onL scaling thanW scaling since the switching and conduction mechanisms are more affected by the process-induced damaged edge regions.
| Original language | English |
|---|---|
| Pages (from-to) | 958-961 |
| Number of pages | 4 |
| Journal | IEEE Electron Device Letters |
| Volume | 43 |
| Issue number | 6 |
| DOIs | |
| State | Published - 1 Jun 2022 |
| Externally published | Yes |
Keywords
- 1/f noise
- ferroelectric tunnel junction (FTJ)
- length
- low-frequency noise (LFN)
- scaling
- width