Investigation of Low-Frequency Noise Characteristics of Ferroelectric Tunnel Junction: From Conduction Mechanism and Scaling Perspectives

  • Wonjun Shin
  • , Jong Ho Bae
  • , Dongseok Kwon
  • , Ryun Han Koo
  • , Byung Gook Park
  • , Daewoong Kwon
  • , Jong Ho Lee

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

We investigate the effects of length (L) and width (W) scaling on the low-frequency noise characteristics of the ferroelectric tunnel junction (FTJ). The FTJ is composed of metal/ferroelectric/dielectric/semicondu- ctor (TiN/HfZrO2/SiO2/n+ Si). In the high-resistance state, 1/f noise increases proportionally to 1/Wα Lβ (α ≅ 1, β > 1), whereas the shot noise has no scaling dependence. In the low-resistance state, the 1/f noise of the FTJ shows a more sensitive dependence onL scaling thanW scaling since the switching and conduction mechanisms are more affected by the process-induced damaged edge regions.

Original languageEnglish
Pages (from-to)958-961
Number of pages4
JournalIEEE Electron Device Letters
Volume43
Issue number6
DOIs
StatePublished - 1 Jun 2022
Externally publishedYes

Keywords

  • 1/f noise
  • ferroelectric tunnel junction (FTJ)
  • length
  • low-frequency noise (LFN)
  • scaling
  • width

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