@inproceedings{3a9a0a5450c941eea172970109849d97,
title = "Investigation of electron beam irradiation effect on pore formation",
abstract = "There have been tremendous interests about the fabrication of the Au plasmonic nanopore due to its capability of the nanosize optical biosensor. We have investigated the influence of low energy electron beam irradiation on an Au nanomembrane during Au nanopore formation. In this report, the influence of electron beam irradiation on the Au nanopore formation will be reported. The nanopores on the 200 nm thick Au membrane were initially fabricated using focused ion beam (FIB) and high energy electron beam techniques such as transmission electron microscopy (TEM), and field emission scanning electron microscopy (FESEM). During high energy electron beam by using TEM, either a «shrinking» or a «opening» phenomenon is reported dependent on the ratio of thickness to aperture diameter. However, for a FESEM electron beam irradiation, a shrinking phenomenon is always observed. In this report, the nanopore formation during FESEM electron beam irradiation will be reported depending upon energy absorption and thermal diffusivity.",
keywords = "biosensor, electron energy absorption, nanopore, scan rate, scanning area, thermal diffusivity",
author = "Choi, \{Seong Soo\} and Park, \{Myoung Jin\} and Han, \{Chul Hee\} and Kim, \{Sung In\} and Yoo, \{Jung Ho\} and Park, \{Kyung Jin\} and Park, \{Nam Kyou\} and Kim, \{Yong Sang\}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Scanning Microscopies 2015 ; Conference date: 29-09-2015 Through 01-10-2015",
year = "2015",
doi = "10.1117/12.2185519",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Maugel, \{Tim K.\} and Newbury, \{Dale E.\} and Postek, \{Michael T.\} and Platek, \{S. Frank\} and Postek, \{Michael T.\} and Platek, \{S. Frank\} and Newbury, \{Dale E.\} and Maugel, \{Tim K.\}",
booktitle = "Scanning Microscopies 2015",
}