@inproceedings{045f3ebfd9d64fee87c841f7aa1f6254,
title = "Industrial-Grade Fabrication of Nanowire Sensor Device Exploiting Sacrificial Shadow Patterning Method",
abstract = "A major obstacle to the industrial application of nanowires is difficulty in fabricating nanowire devices with uniform performance. In this study, we newly developed a wafer-level uniformly size-controlled nanowire fabrication method for reliable demonstration of a high-yield, uniform nano-sensor device. We show that the developed fabrication method can be used to simply fabricate remarkably small nanowires (sub-50 nm) with a wide material selection. Importantly, the fabricated nanowires have ultra-high size uniformity on the 4-inch wafer. Finally, we demonstrate nanowire-based hydrogen (H2) sensors using the developed method. Owing to the geometric uniformity of the fabricated nanowires, the sensor devices achieved highly uniform sensitivity of 10.9±0.5 \% at a 2\% H2 concentration.",
keywords = "Nanowire fabrication method, Nanowire sensor device, Sacrificial shadow pattering method",
author = "Jo, \{Min Seung\} and Seo, \{Min Ho\} and Choi, \{Kwang Wook\} and Lee, \{Jae Shin\} and Yoo, \{Jae Young\} and Song, \{Hyeon Joo\} and Yoon, \{Jun Bo\}",
note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",
year = "2019",
month = jun,
doi = "10.1109/TRANSDUCERS.2019.8808455",
language = "English",
series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1694--1697",
booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",
}