In situ study of the formation of SiC thin films on Si(111) surfaces with 1,3-disilabutane: Adsorption properties and initial deposition characteristics
- H. G. Yoon
- , J. H. Boo
- , W. L. Liu
- , S. B. Lee
- , S. C. Park
- , H. Kang
- , Y. Kim
- Sungkyunkwan University
- Pohang University of Science and Technology
- Korea Research Institute of Chemical Technology
Research output: Contribution to journal › Conference article › peer-review
11
Link opens in a new tab
Scopus
citations