In situ dry cleaning of Si wafer using OF2/NH3 remote plasma with low global warming potential
- Jin Woo Park
- , Myeong Gyoon Chae
- , Doo San Kim
- , Won Oh Lee
- , Han Dock Song
- , Changhwan Choi
- , Geun Young Yeom
- Sungkyunkwan University
- Hanyang University
- Wonik Materials Co., Ltd.
Research output: Contribution to journal › Article › peer-review
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