Improvement of a block co-polymer (PS-b-PDMS) template etch profile using amorphous carbon layer

  • Jisoo Oh
  • , Jong Sik Oh
  • , Dain Sung
  • , Soonmin Yim
  • , Seungwon Song
  • , Geunyoung Yeom

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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