Improved performance of nonevaporable getter activated by a continuous wave infrared laser

S. N. Cha; J. Y. Choung; B. G. Song; J. M. Choi; I. T. Han; N. S. Park; J. E. Jung; N. S. Lee; J. M. Kim; J. K. Chee; J. P. Hong

doi:10.1116/1.1371016

Improved performance of nonevaporable getter activated by a continuous wave infrared laser

S. N. Cha
, J. Y. Choung
, B. G. Song
, J. M. Choi
, I. T. Han
, N. S. Park
, J. E. Jung
, N. S. Lee
, J. M. Kim
, J. K. Chee
, J. P. Hong

Samsung
Hongik University
Hanyang University

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

A simple and efficient activation method of nonevaporable getter (NEG) was demonstrated by the use of infrared laser irradiation. The investigation revealed that the getter activation process was considerably enhanced with the use of laser irradiation. Laser irradiation helps in shortening the time and increasing the gas adsorption capacity and produces a desired vacuum for flat panel display. The laser irradiation method was found to be a very promising technology for nonevaporable getter activation on comparison with conventional thermal heating method.

Original language	English
Pages (from-to)	870-873
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	3
DOIs	https://doi.org/10.1116/1.1371016
State	Published - May 2001
Externally published	Yes
Event	13th International Vaccum Microelectronics Conference - Guangzhou, China Duration: 14 Aug 2000 → 17 Aug 2000

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Cha, S. N., Choung, J. Y., Song, B. G., Choi, J. M., Han, I. T., Park, N. S., Jung, J. E., Lee, N. S., Kim, J. M., Chee, J. K., & Hong, J. P. (2001). Improved performance of nonevaporable getter activated by a continuous wave infrared laser. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 19(3), 870-873. https://doi.org/10.1116/1.1371016

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title = "Improved performance of nonevaporable getter activated by a continuous wave infrared laser",

abstract = "A simple and efficient activation method of nonevaporable getter (NEG) was demonstrated by the use of infrared laser irradiation. The investigation revealed that the getter activation process was considerably enhanced with the use of laser irradiation. Laser irradiation helps in shortening the time and increasing the gas adsorption capacity and produces a desired vacuum for flat panel display. The laser irradiation method was found to be a very promising technology for nonevaporable getter activation on comparison with conventional thermal heating method.",

author = "Cha, \{S. N.\} and Choung, \{J. Y.\} and Song, \{B. G.\} and Choi, \{J. M.\} and Han, \{I. T.\} and Park, \{N. S.\} and Jung, \{J. E.\} and Lee, \{N. S.\} and Kim, \{J. M.\} and Chee, \{J. K.\} and Hong, \{J. P.\}",

year = "2001",

month = may,

doi = "10.1116/1.1371016",

language = "English",

volume = "19",

pages = "870--873",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "3",

note = "13th International Vaccum Microelectronics Conference ; Conference date: 14-08-2000 Through 17-08-2000",

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TY - JOUR

T1 - Improved performance of nonevaporable getter activated by a continuous wave infrared laser

AU - Cha, S. N.

AU - Choung, J. Y.

AU - Song, B. G.

AU - Choi, J. M.

AU - Han, I. T.

AU - Park, N. S.

AU - Jung, J. E.

AU - Lee, N. S.

AU - Kim, J. M.

AU - Chee, J. K.

AU - Hong, J. P.

PY - 2001/5

Y1 - 2001/5

N2 - A simple and efficient activation method of nonevaporable getter (NEG) was demonstrated by the use of infrared laser irradiation. The investigation revealed that the getter activation process was considerably enhanced with the use of laser irradiation. Laser irradiation helps in shortening the time and increasing the gas adsorption capacity and produces a desired vacuum for flat panel display. The laser irradiation method was found to be a very promising technology for nonevaporable getter activation on comparison with conventional thermal heating method.

AB - A simple and efficient activation method of nonevaporable getter (NEG) was demonstrated by the use of infrared laser irradiation. The investigation revealed that the getter activation process was considerably enhanced with the use of laser irradiation. Laser irradiation helps in shortening the time and increasing the gas adsorption capacity and produces a desired vacuum for flat panel display. The laser irradiation method was found to be a very promising technology for nonevaporable getter activation on comparison with conventional thermal heating method.

UR - https://www.scopus.com/pages/publications/0035326273

U2 - 10.1116/1.1371016

DO - 10.1116/1.1371016

M3 - Conference article

AN - SCOPUS:0035326273

SN - 1071-1023

VL - 19

SP - 870

EP - 873

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

T2 - 13th International Vaccum Microelectronics Conference

Y2 - 14 August 2000 through 17 August 2000

ER -

Improved performance of nonevaporable getter activated by a continuous wave infrared laser

Abstract

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