Impact of metal nitrides on contact resistivity of metal-interlayer-semiconductor source/drain in sub-14 nm n-type Si FinFET
- Juhan Ahn
- , Jeong Kyu Kim
- , Jong Kook Kim
- , Jinok Kim
- , Jin Hong Park
- , Hyun Yong Yu
Research output: Contribution to journal › Article › peer-review
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