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Impact of local strain from selective epitaxial germanium with thin Si/SiGe buffer on high-performance p-i-n photodetectors with a low thermal budget

  • W. Y. Loh
  • , J. Wang
  • , J. D. Ye
  • , R. Yang
  • , H. S. Nguyen
  • , K. T. Chua
  • , J. F. Song
  • , T. H. Loh
  • , Y. Z. Xiong
  • , S. J. Lee
  • , M. B. Yu
  • , G. Q. Lo
  • , D. L. Kwong

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