TY - JOUR
T1 - Hydrogen and oxygen induced abnormal reliability degradation in flexible top-gate amorphous In-Ga-Zn-O thin-film transistors under negative bias thermal illumination stress
AU - Kim, Dongbhin
AU - Lee, Kyeong Bae
AU - Choi, Byoungdeog
N1 - Publisher Copyright:
© 2025 Elsevier Ltd
PY - 2025/12
Y1 - 2025/12
N2 - Ensuring device stability under various stress factors is critical for the long-term operation of flexible amorphous InGaZnO thin-film transistors (a-IGZO TFTs) for market-ready display applications. Here, we report the abnormal threshold voltage (Vth) shift behavior in flexible top-gate a-IGZO TFTs under negative-bias temperature illumination stress (NBTIS). Under NBTIS, an initial negative Vth shift occurred. However, with an extended stress duration, an unexpected positive Vth shift occurred, deviating from the expected charge-trapping model. Our results show that this phenomenon is strongly correlated with the thickness of the a-IGZO active layer, with thicker films exhibiting more pronounced reverse Vth shifts. Photo-excited charge collection spectroscopy and X-ray photoelectron spectroscopy analyses revealed that the density of hydrogen/oxygen-related defect states near the valence band maximum increased with increasing a-IGZO thickness, facilitating the enhanced photo and thermal excitation of charge carriers under illumination and thermal stresses. We demonstrate that the optimization of the a-IGZO channel thickness can effectively suppress the observed abnormal reliability degradation under NBTIS, providing valuable insights into optimizing a-IGZO TFTs for enhanced long-term stability in next-generation flexible and transparent electronic applications.
AB - Ensuring device stability under various stress factors is critical for the long-term operation of flexible amorphous InGaZnO thin-film transistors (a-IGZO TFTs) for market-ready display applications. Here, we report the abnormal threshold voltage (Vth) shift behavior in flexible top-gate a-IGZO TFTs under negative-bias temperature illumination stress (NBTIS). Under NBTIS, an initial negative Vth shift occurred. However, with an extended stress duration, an unexpected positive Vth shift occurred, deviating from the expected charge-trapping model. Our results show that this phenomenon is strongly correlated with the thickness of the a-IGZO active layer, with thicker films exhibiting more pronounced reverse Vth shifts. Photo-excited charge collection spectroscopy and X-ray photoelectron spectroscopy analyses revealed that the density of hydrogen/oxygen-related defect states near the valence band maximum increased with increasing a-IGZO thickness, facilitating the enhanced photo and thermal excitation of charge carriers under illumination and thermal stresses. We demonstrate that the optimization of the a-IGZO channel thickness can effectively suppress the observed abnormal reliability degradation under NBTIS, providing valuable insights into optimizing a-IGZO TFTs for enhanced long-term stability in next-generation flexible and transparent electronic applications.
KW - a-IGZO TFT
KW - Device reliability
KW - Hydrogen and oxygen impurity
KW - Negative bias thermal illumination stress
KW - Photo-excited charge collection spectroscopy
UR - https://www.scopus.com/pages/publications/105016310318
U2 - 10.1016/j.mejo.2025.106902
DO - 10.1016/j.mejo.2025.106902
M3 - Article
AN - SCOPUS:105016310318
SN - 0026-2692
VL - 166
JO - Microelectronics Journal
JF - Microelectronics Journal
M1 - 106902
ER -