High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition

Ji Seoung Jeong; Sunyoung Shin; Bo Keun Park; Seung Uk Son; Taek Mo Chung; Ji Yeon Ryu

doi:10.1021/acsomega.4c03482

High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition

Ji Seoung Jeong
, Sunyoung Shin
, Bo Keun Park
, Seung Uk Son
, Taek Mo Chung
, Ji Yeon Ryu

Department of Chemistry

Korea Research Institute of Chemical Technology
Sungkyunkwan University
University of Science and Technology UST

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

We report the synthesis and characterization of novel antimony(III) complexes: Sb(mpa)₃ (1), Sb(mmpa)₃ (2), Sb(mdpa)₃ (3), Sb(epa)₃ (4), Sb(empa)₃ (5), and Sb(edpa)₃ (6) (mpa = N-methoxypropanamide, mmpa = N-methoxy-2-methyl-propanamide, mdpa = N-methoxy-2,2-dimethylpropanamide, epa = N-ethoxypropanamide, empa = N-ethoxy-2-methylpropanamide, and edpa = N-ethoxy-2,2-dimethylpropanamide, via a salt-elimination reaction with SbCl₃ and sodium-substituted carboxamide. The molecular structure of 6 revealed the formation of a homoleptic conformer with a highly distorted pentagonal bipyramidal geometry, as determined by X-ray crystallography. Thermogravimetric analysis showed excellent volatility at elevated temperatures, with complex 4 displaying the lowest residual mass of 0.16% at 500 °C. For complexes 4, 5, and 6, the temperature at a vapor pressure of 1 Torr and the enthalpy of vaporization were estimated to be 58, 64, and 45 °C and 83.31, 103.58, and 99.93 kJ/mol, respectively.

Original language	English
Pages (from-to)	31871-31877
Number of pages	7
Journal	ACS Omega
Volume	9
Issue number	29
DOIs	https://doi.org/10.1021/acsomega.4c03482
State	Published - 23 Jul 2024

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@article{e4d20463739e4cc2951e8dc3468d9b26,

title = "High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition",

abstract = "We report the synthesis and characterization of novel antimony(III) complexes: Sb(mpa)3 (1), Sb(mmpa)3 (2), Sb(mdpa)3 (3), Sb(epa)3 (4), Sb(empa)3 (5), and Sb(edpa)3 (6) (mpa = N-methoxypropanamide, mmpa = N-methoxy-2-methyl-propanamide, mdpa = N-methoxy-2,2-dimethylpropanamide, epa = N-ethoxypropanamide, empa = N-ethoxy-2-methylpropanamide, and edpa = N-ethoxy-2,2-dimethylpropanamide, via a salt-elimination reaction with SbCl3 and sodium-substituted carboxamide. The molecular structure of 6 revealed the formation of a homoleptic conformer with a highly distorted pentagonal bipyramidal geometry, as determined by X-ray crystallography. Thermogravimetric analysis showed excellent volatility at elevated temperatures, with complex 4 displaying the lowest residual mass of 0.16\% at 500 °C. For complexes 4, 5, and 6, the temperature at a vapor pressure of 1 Torr and the enthalpy of vaporization were estimated to be 58, 64, and 45 °C and 83.31, 103.58, and 99.93 kJ/mol, respectively.",

author = "Jeong, \{Ji Seoung\} and Sunyoung Shin and Park, \{Bo Keun\} and Son, \{Seung Uk\} and Chung, \{Taek Mo\} and Ryu, \{Ji Yeon\}",

note = "Publisher Copyright: {\textcopyright} 2024 The Authors. Published by American Chemical Society.",

year = "2024",

month = jul,

day = "23",

doi = "10.1021/acsomega.4c03482",

language = "English",

volume = "9",

pages = "31871--31877",

journal = "ACS Omega",

issn = "2470-1343",

publisher = "American Chemical Society",

number = "29",

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TY - JOUR

T1 - High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition

AU - Jeong, Ji Seoung

AU - Shin, Sunyoung

AU - Park, Bo Keun

AU - Son, Seung Uk

AU - Chung, Taek Mo

AU - Ryu, Ji Yeon

PY - 2024/7/23

Y1 - 2024/7/23

N2 - We report the synthesis and characterization of novel antimony(III) complexes: Sb(mpa)3 (1), Sb(mmpa)3 (2), Sb(mdpa)3 (3), Sb(epa)3 (4), Sb(empa)3 (5), and Sb(edpa)3 (6) (mpa = N-methoxypropanamide, mmpa = N-methoxy-2-methyl-propanamide, mdpa = N-methoxy-2,2-dimethylpropanamide, epa = N-ethoxypropanamide, empa = N-ethoxy-2-methylpropanamide, and edpa = N-ethoxy-2,2-dimethylpropanamide, via a salt-elimination reaction with SbCl3 and sodium-substituted carboxamide. The molecular structure of 6 revealed the formation of a homoleptic conformer with a highly distorted pentagonal bipyramidal geometry, as determined by X-ray crystallography. Thermogravimetric analysis showed excellent volatility at elevated temperatures, with complex 4 displaying the lowest residual mass of 0.16% at 500 °C. For complexes 4, 5, and 6, the temperature at a vapor pressure of 1 Torr and the enthalpy of vaporization were estimated to be 58, 64, and 45 °C and 83.31, 103.58, and 99.93 kJ/mol, respectively.

AB - We report the synthesis and characterization of novel antimony(III) complexes: Sb(mpa)3 (1), Sb(mmpa)3 (2), Sb(mdpa)3 (3), Sb(epa)3 (4), Sb(empa)3 (5), and Sb(edpa)3 (6) (mpa = N-methoxypropanamide, mmpa = N-methoxy-2-methyl-propanamide, mdpa = N-methoxy-2,2-dimethylpropanamide, epa = N-ethoxypropanamide, empa = N-ethoxy-2-methylpropanamide, and edpa = N-ethoxy-2,2-dimethylpropanamide, via a salt-elimination reaction with SbCl3 and sodium-substituted carboxamide. The molecular structure of 6 revealed the formation of a homoleptic conformer with a highly distorted pentagonal bipyramidal geometry, as determined by X-ray crystallography. Thermogravimetric analysis showed excellent volatility at elevated temperatures, with complex 4 displaying the lowest residual mass of 0.16% at 500 °C. For complexes 4, 5, and 6, the temperature at a vapor pressure of 1 Torr and the enthalpy of vaporization were estimated to be 58, 64, and 45 °C and 83.31, 103.58, and 99.93 kJ/mol, respectively.

UR - https://www.scopus.com/pages/publications/85199395837

U2 - 10.1021/acsomega.4c03482

DO - 10.1021/acsomega.4c03482

M3 - Article

AN - SCOPUS:85199395837

SN - 2470-1343

VL - 9

SP - 31871

EP - 31877

JO - ACS Omega

JF - ACS Omega

IS - 29

ER -

High Volatile Antimony(III) Precursors for Metal Oxide Thin Film Deposition

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