High quality YBa2Cu3O7-δ Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage

Nianhua Peng; Dae Joon Kang; Chris Jeynes; Roger P. Webb; David F. Moore; Mark G. Blamire; Ivan R. Chakarov

doi:10.1109/TASC.2003.814070

High quality YBa₂Cu₃O_7-δ Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage

Nianhua Peng
, Dae Joon Kang
, Chris Jeynes
, Roger P. Webb
, David F. Moore
, Mark G. Blamire
, Ivan R. Chakarov

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the metal mask structure design. A high resolution and high aspect ratio metal mask opening was fabricated by focused 30 keV Ga ion beam milling. Various nonconducting oxide buffer layers have been investigated for a Ga contamination free mask fabrication. A contamination free irradiation process and subsequent removal of metal mask after ion irradiation are the keys for the improved properties of junctions fabricated with YBCO.

Original language	English
Pages (from-to)	889-892
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	13
Issue number	2 I
DOIs	https://doi.org/10.1109/TASC.2003.814070
State	Published - Jun 2003
Externally published	Yes
Event	2002 Applied Superconductivity Conference - Houston, TX, United States Duration: 4 Aug 2002 → 9 Aug 2002

Keywords

Ion irradiation damage
Josephson junction
MID
Monte Carlo simulation
YBCO

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10.1109/TASC.2003.814070

Cite this

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title = "High quality YBa2Cu3O7-δ Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage",

abstract = "High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the metal mask structure design. A high resolution and high aspect ratio metal mask opening was fabricated by focused 30 keV Ga ion beam milling. Various nonconducting oxide buffer layers have been investigated for a Ga contamination free mask fabrication. A contamination free irradiation process and subsequent removal of metal mask after ion irradiation are the keys for the improved properties of junctions fabricated with YBCO.",

keywords = "Ion irradiation damage, Josephson junction, MID, Monte Carlo simulation, YBCO",

author = "Nianhua Peng and Kang, \{Dae Joon\} and Chris Jeynes and Webb, \{Roger P.\} and Moore, \{David F.\} and Blamire, \{Mark G.\} and Chakarov, \{Ivan R.\}",

year = "2003",

month = jun,

doi = "10.1109/TASC.2003.814070",

language = "English",

volume = "13",

pages = "889--892",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2 I",

note = "2002 Applied Superconductivity Conference ; Conference date: 04-08-2002 Through 09-08-2002",

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T1 - High quality YBa2Cu3O7-δ Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage

AU - Peng, Nianhua

AU - Kang, Dae Joon

AU - Jeynes, Chris

AU - Webb, Roger P.

AU - Moore, David F.

AU - Blamire, Mark G.

AU - Chakarov, Ivan R.

PY - 2003/6

Y1 - 2003/6

N2 - High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the metal mask structure design. A high resolution and high aspect ratio metal mask opening was fabricated by focused 30 keV Ga ion beam milling. Various nonconducting oxide buffer layers have been investigated for a Ga contamination free mask fabrication. A contamination free irradiation process and subsequent removal of metal mask after ion irradiation are the keys for the improved properties of junctions fabricated with YBCO.

AB - High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the metal mask structure design. A high resolution and high aspect ratio metal mask opening was fabricated by focused 30 keV Ga ion beam milling. Various nonconducting oxide buffer layers have been investigated for a Ga contamination free mask fabrication. A contamination free irradiation process and subsequent removal of metal mask after ion irradiation are the keys for the improved properties of junctions fabricated with YBCO.

KW - Ion irradiation damage

KW - Josephson junction

KW - MID

KW - Monte Carlo simulation

KW - YBCO

UR - https://www.scopus.com/pages/publications/0041975819

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DO - 10.1109/TASC.2003.814070

M3 - Conference article

AN - SCOPUS:0041975819

SN - 1051-8223

VL - 13

SP - 889

EP - 892

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

IS - 2 I

T2 - 2002 Applied Superconductivity Conference

Y2 - 4 August 2002 through 9 August 2002

ER -

High quality YBa₂Cu₃O_7-δ Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage

Abstract

Keywords

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