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High quality Ta2O5 gate dielectrics with Tox,eq < 10 angstrom

  • H. F. Luan
  • , S. J. Lee
  • , C. H. Lee
  • , S. C. Song
  • , Y. L. Mao
  • , Y. Senzaki
  • , D. Roberts
  • , D. L. Kwong

Research output: Contribution to journal › Conference article › peer-review

31   Link opens in a new tab Scopus citations

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