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High performance mixed signal circuits enabled by the direct monolithic heterogeneous integration of InP HBT and Si CMOS on a silicon substrate

  • T. E. Kazior
  • , J. R. LaRoche
  • , M. Urteaga
  • , J. Bergman
  • , M. J. Choe
  • , K. J. Lee
  • , T. Seong
  • , M. Seo
  • , A. Yen
  • , D. Lubyshev
  • , J. M. Fastenau
  • , W. K. Liu
  • , D. Smith
  • , D. Clark
  • , R. Thompson
  • , M. T. Bulsara
  • , E. A. Fitzgerald
  • , C. Drazek
  • , E. Guiot
  • RTX Corporation
  • Teledyne Technologies
  • IQE plc
  • Massachusetts Institute of Technology
  • Soitec S.A.

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work we present recent results on the direct heterogeneous integration of InP HBTs and Si CMOS on a silicon template wafer or SOLES (Silicon On Lattice Engineered Substrate). InP HBTs whose performance are comparable to HBTs on the native InP substrates have been repeatedly achieved. 100% heterogeneous interconnect yield has been achieved on daisy chain test structures with CMOS-InP HBT spacing (interconnect length) as small as 2.5um. In DARPA COSMOS Phase 1 we designed and fabricated a differential amplifier that met the program Go/NoGo metrics with first pass design success. As the COSMOS Phase 2 demonstration vehicle we designed and fabricated a low power dissipation, high resolution, 500MHz bandwidth digital-to-analog converter (DAC).

Original languageEnglish
Title of host publication2010 IEEE Compound Semiconductor Integrated Circuit Symposium, CSICS 2010 - Technical Digest 2010
DOIs
StatePublished - 2010
Externally publishedYes
Event2010 32nd IEEE Compound Semiconductor Integrated Circuit Symposium, CSICS 2010 - Monterey, CA, United States
Duration: 3 Oct 20106 Oct 2010

Publication series

NameTechnical Digest - IEEE Compound Semiconductor Integrated Circuit Symposium, CSIC
ISSN (Print)1550-8781

Conference

Conference2010 32nd IEEE Compound Semiconductor Integrated Circuit Symposium, CSICS 2010
Country/TerritoryUnited States
CityMonterey, CA
Period3/10/106/10/10

Keywords

  • CMOS integrated circuits
  • Heterojunction bipolar transistors
  • Indium phosphide
  • Monolithic integrated circuits
  • Silicon

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