Growth of TiO ₂ nanorods on a ta substrate by metal-organic chemical vapor deposition

TiO ₂ nanorods were successfully grown on Tantalum (Ta) substrates using titanium tetra isopropoxide (TTIP) as a single precursor without any carriers or bubbling gases. For characterization of the TiO ₂ structures, scanning electron microscopy (SEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS) were employed. For substrate temperatures below 800 °C, a rough film structure without nanorods could be found. However, at a sample temperature of 800 °C, nanorod structures with a respective diameter and length of 0.1~0.2 fim and 0.7~1.5 μm, respectively, could be synthesized. The nanorods exhibited a rutile phase with a 2:1 stoichiometry of O:Ti, identified using XRD and XPS. When the growth temperature exceeded 800 °C, agglomeration of the nanorods was identified.